Influence of Slotting and Boss Radius on the Response of MEMS Based Intracranial Pressure Sensor
Venkatesh Kadbur Prabhakar Rao1*, Ishaan Ghosh2, Deepankar Deshmukh2
1Department of Mechanical Engineering, Birla Institute of Technology and Science (BITS), Pilani, Rajasthan, India- 333031.
2Department of Electrical and Electronics Engineering, Birla Institute of Technology and Science (BITS), Pilani, Rajasthan, India-333031.
In the present paper, we design a Microelectro- Mechanical System (MEMS) piezoresistive pressure sensor for intracranial pressure monitoring. The pressure sensor design presented in this paper consists of a square diaphragm. The slots were introduced to square diaphragm increases the stresses developed thus enhancing the sensitivity of the sensor. In addition to slots, a central boss was introduced to enhance the sensitivity of the sensor. We carried out numerical simulation to evaluate the sensitivity of the sensor. Parametric studies were done to optimize the central boss radius to enhance the sensitivity of the sensor
Key words: Pressure sensor, MEMS, Piezoresistance, Sensitivity.