Influence of Slotting and Boss Radius on the Response of MEMS Based Intracranial Pressure Sensor

Authors

  • Venkatesh Kadbur Prabhakar Rao Department of Mechanical Engineering, Birla Institute of Technology and Science (BITS), Pilani, Rajasthan, India- 333031.
  • Ishaan Ghosh Department of Electrical and Electronics Engineering, Birla Institute of Technology and Science (BITS), Pilani, Rajasthan, India-333031.
  • Deepankar Deshmukh Department of Electrical and Electronics Engineering, Birla Institute of Technology and Science (BITS), Pilani, Rajasthan, India-333031.

Keywords:

Pressure sensor, MEMS, Piezoresistance, Sensitivity

Abstract

In the present paper, we design a Microelectro- Mechanical System (MEMS) piezoresistive pressure sensor for intracranial pressure monitoring. The pressure sensor design presented in this paper consists of a square diaphragm. The slots were introduced to square diaphragm increases the stresses developed thus enhancing the sensitivity of the sensor
In addition to slots, a central boss was introduced to enhance the sensitivity of the sensor. We carried out numerical simulation to evaluate the sensitivity of the sensor. Parametric studies were done to optimize the central boss radius to enhance the sensitivity of the sensor.

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Published

2018-06-30

Issue

Volume-1, Issue-1, 2018

Section

Research Paper(s)

Copyright (c) 2018 Venkatesh Kadbur Prabhakar Rao, Ishaan Ghosh, Deepankar Deshmukh

Creative Commons License

This work is licensed under a Creative Commons Attribution-NonCommercial 4.0 International License.